SPECIALTY POLISHING CLEANING CHEMICALS

Brand	Owner	Address	Description
ECO-SAFE	Amrep, Inc.	1310 Seaboard Industrial Boulevard, N.W. Atlanta GA 30318	SPECIALTY POLISHING AND CLEANING CHEMICALS, NAMELY, GLASS AND CHALKBOARD CLEANERS, FLOOR AND FURNITURE POLISHES, FLOOR WAXES, BUFFING COMPOUNDS FOR FLOORS, FINISHES AND SEALERS FOR HARD FLOOR SURFACES SUCH AS CONCRETE, WOOD, TERRAZZO AND VINYL, STRIPPERS TO REMOVE FLOOR FINISHES, HAND CLEANERS, INDUSTRIAL SOLVENT CLEANERS FOR USE ON PARTS AND EQUIPMENT, METAL CLEANERS, DEGREASERS, AND CLEANER/SANITIZER FOR HARD SURFACES FOR GENERAL INDUSTRIAL USE;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A polishing pad is cleaned of Cu CMP by-products, subsequent to planarizing a wafer, to reduce pad-glazing by applying to the polishing pad surface a composition comprising about 0.1 to about 3.0 wt. % of at least one organic compound having one or more amine or amide groups, an acid or a base in an amount sufficient to adjust the pH of the composition to about 5.0 to about 12.0, the remainder water. Embodiments comprise ex situ cleaning of a rotating polishing pad by applying a solution having a pH of about 5.0 to about 12.0 at a flow rate of about 100 to about 600 ml/min. for about 3 to about 20 seconds after polishing a wafer having a Cu-containing surface and then removing the cleaning solution from the polishing pad by high pressure rinsing with water.