SUBSTRATE PROCESSING SYSTEMS COMPRISING COMPUTER

Brand Owner (click to sort) Address Description
CMC Lam Research Corporation 4650 Cushing Parkway Fremont CA 94538 substrate processing systems comprising computer hardware and software for use in cleaning, scrubbing, rinsing, drying, buffing and polishing systems for semiconductor manufacturing;
DSS OnTrak Systems, Inc. 1753 So. Main Street Milpitas CA 95035 substrate processing systems comprising computer hardware and software for use in cleaning, scrubbing, rinsing, drying and polishing systems for semiconductor manufacturing;
DSS-150 OnTrak Systems, Inc. 1753 So. Main Street Milpitas CA 95035 substrate processing systems comprising computer hardware and software for use in cleaning, scrubbing, rinsing, drying and polishing systems for semiconductor manufacturing;
DSS-200 OnTrak Systems, Inc. 1753 So. Main Street Milpitas CA 95035 substrate processing systems comprising computer hardware and software for use in cleaning, scrubbing, rinsing, drying and polishing systems for semiconductor manufacturing;
ONTRAK Lam Research Corporation 4650 Cushing Parkway Fremont CA 94538 substrate processing systems comprising computer hardware and software for use in cleaning, scrubbing, rinsing, drying and polishing systems for semiconductor manufacturing;ON TRACK;
ONTRAK Lam Research Corporation 4650 Cushing Parkway Fremont CA 94538 substrate processing systems comprising computer hardware and software for use in cleaning, scrubbing, rinsing, drying and polishing systems for semiconductor manufacturing;ON TRACK;
TELEPARTS OnTrak Systems, Inc. 1753 So. Main Street Milpitas CA 95035 substrate processing systems comprising computer hardware and software for use in cleaning, scrubbing, rinsing, drying and polishing systems for semiconductor manufacturing;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. A method of inspecting a substrate processing apparatus that enables a reduction in operator labor time to be achieved. A host computer instructs a substrate processing apparatus to prohibit transfer of a product wafer into the substrate processing apparatus during a period of cleaning the substrate processing apparatus. The substrate processing apparatus notifies the host computer of a number and types of inspection wafers to be used in inspections for predetermined inspection items. The host computer notifies the substrate processing apparatus that preparation of the inspection wafers has been completed.