SURFACE TREATMENT MACHINED METAL

Brand	Owner	Address	Description
IONIT OX	OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON	Churerstrasse 120 Pfäffikon 8808 Switzerland	Surface treatment of machined metal pieces, namely, plasma heat treatment of metal, plasma-etching, applying anti-corrosive finishes to metal parts;[ Machines for heat treatment of surfaces; surface nitriding machines; machines for gas nitriding of surfaces ];[ Common metals and their alloys; unwrought and semi-wrought stainless steels and their alloys ];[ Precious metals and their alloys ];OX;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

The present invention is directed to a structure comprised of alternating layers of metal and sacrificial material built up using standard CMOS processing techniques, a process for building such a structure, a process for fabricating devices from such a structure, and the devices fabricated from such a structure. In one embodiment, a first metal layer is carried by a substrate. A first sacrificial layer is carried by the first metal layer. A second metal layer is carried by the sacrificial layer. The second metal layer has a portion forming a micro-machined metal mesh. When the portion of the first sacrificial layer in the area of the micro-machined metal mesh is removed, the micro-machined metal mesh is released and suspended above the first metal layer a height determined by the thickness of the first sacrificial layer. The structure may be varied by providing a base layer of sacrificial material between the surface of the substrate and the first metal layer. In that manner, a portion of the first metal layer may form a micro-machined mesh which is released when a portion of the base sacrificial layer in the area of the micro-machined mesh is removed. Additionally, a second layer of sacrificial material and a third metal layer may be provided. A micro-machined mesh may be formed in a portion of the third metal layer. The structure of the present invention may be used to construct variable capacitors, switches and, when certain of the meshes are sealed, microspeakers and microphones.