Where the owner name is not linked, that owner no longer owns the brand
Technical Examples
There is disclosed a scrub cleaning device which can reduce cleaning time and which requires no large-scaled device for transferring a substrate to the next cleaning process. The scrub cleaning device comprises: a scrub pad 10 provided with two annular plate scrubbers 11, 11', and wheels 12, 12' for supporting an inner peripheral surface A of the annular plate scrubber and a surface B opposite a scrub surface so that the scrub surfaces of the two annular plate scrubbers 11, 11' fit each other, and for rotating the scrubber around-the central shaft of the annular plate scrubber; and a guide member (not shown), disposed along the outer periphery of the scrub pad 10, for conveying the substrate in the rotation direction of the scrub pad 10, and the scrub cleaning of the substrate is performed when the substrate held between the two opposite scrubbers 11, 11' is conveyed in the rotation direction of the scrubbers 11, 11' by rotation of the scrub pad 10, and rotated by a friction force generated by abutment on the guide member.