SYSTEM THERMAL TREATMENT

Brand	Owner	Address	Description
BLUESTAR	CONVERSION ENERGY SYSTEMS, INC	Suite 213W 2625 Butterfield Road Oak Brook IL 60523	System for thermal treatment of materials; System for generating energy;The mark consists of One word, BLUESTAR, comprises the mark, along with a starburst in the upper right area next to the R.;BLUE STAR;Color is not claimed as a feature of the mark.;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A method of manufacturing a MOS transistor is provided that achieves high-speed devices by reducing nitrogen diffusion to a silicon substrate interface due to redistribution of nitrogen and further suppressing its diffusion to a polysilicon interface, which prevents realization of faster transistors. An oxide film is exposed to a nitriding atmosphere to introduce nitrogen into the oxide film, and a thermal treatment process is performed in an oxidizing atmosphere. The thermal treatment process temperature in the oxidizing atmosphere is made equal to or higher than the maximum temperature in all the thermal treatment processes that are performed later than that thermal treatment process step.