SYSTEM COMPRISED SENSORS

Brand Owner Address Description
RADIUS INDUSTRIAL SCIENTIFIC CORPORATION 1 Life Way Pittsburgh PA 15205 System comprised of sensors for monitoring combustible gases, toxic gases, oxygen and carbon monixide;
 

Where the owner name is not linked, that owner no longer owns the brand

   
Technical Examples
  1. There is provided by this invention a wafer probe for measuring plasma and surface characteristics in plasma processing environment that utilizes integrated sensors on a wafer substrate. A microprocessor mounted on the substrate receives input signals from the integrated sensors to process, store, and transmit the data. A wireless communication transceiver receives the data from the microprocessor and transmits information outside of the plasma processing system to a computer that collects the data during plasma processing. The integrated sensors may be dual floating Langmuir probes, temperature measuring devices, resonant beam gas sensors, or hall magnetic sensors. There is also provided a self-contained power source that utilizes the plasma for power that is comprised of a topographically dependent charging device or a charging structure that utilizes stacked capacitors.