SYSTEMS MONITORING GAS

Brand Owner Address Description
EMS HAWS CORPORATION 1455 Kleppe Lane Sparks NV 89431 Systems for monitoring gas and liquid effluents, namely, liquid acid and exhaust effluents from semiconductor processing equipment;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. A chemical mechanical polishing apparatus and method can use an eddy current monitoring system and an optical monitoring system. Signals from the monitoring systems can be combined on an output line and extracted by a computer. A thickness of a polishing pad can be calculated. The eddy current monitoring system and optical monitoring system can measure substantially the same location on the substrate.