TANTALUM OXIDE

Brand Owner Address Description
FANSTEEL FANSTEEL METALLURGICAL CORPORATION 2200 SHERIDAN ROAD NORTH CHICAGO IL TANTALUM OXIDE, TANTALUM CARBIDE, SODIUM TUNGSTATE, TUNGSTIC ACID, TUNGSTEN CARBIDE, TUNGSTEN TITANIUM CARBIDE, POTASSIUM TANTALUM FLUORIDE, COLUMBIUM OXIDE, COLUMBIUM CARBIDE, COLUMBIUM OXYFLUORIDE, AND POTASSIUM COLUMBATE;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. A semiconductor device is prepared using an insulating film consisting of a tantalum-tungsten oxide crystal film, a tantalum-molybdenum oxide crystal film, or a laminated film where a silicon oxide, silicon oxynitride or silicon nitride film is laminated on the crystal film. The tantalum-tungsten oxide film is deposited on a substrate under an atmosphere of a mixture of the first material gas comprising tantalum, the second material gas comprising tungsten and an oxidizing agent. For improving a dielectric constant of the tantalum-tungsten or tantalum-molybdenum oxide crystal film, on a Ru substrate with (001) orientation is deposited a oxide crystal film, which is then heated in N2O plasma and subject to rapid thermal nitriding.