THICKNESS MEASURING GAUGES MEASURING

Brand	Owner	Address	Description
POSIPROBE	DEFELSKO CORPORATION	800 PROCTOR AVENUE OGDENSBURG NY 136692205	thickness measuring gauges for measuring the thickness of coatings on a surface;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A thickness of a wafer during polishing operation is detected to accurately perform the polishing. A thickness measuring method, which measures the thickness of the wafer of wafer 7 in polishing a surface, comprises the steps of irradiating the thin film-like material during the surface polishing from a backside with probe light, measuring a reflectance spectrum with a dispersion type multi-channel spectroscope using a photodiode array which has particularly high sensitivity to light having a wavelength ranging from 1 to 2.4 ?m, and calculating the thickness on the basis of a wave form of the reflectance spectrum. The surface polishing is performed while the thickness of the wafer 7 is measured by the above-described thickness measuring method, and the polishing is finished when the thickness of the wafer 7 reaches a target thickness.