TRANSFER ROBOT USED ATMOSPHERIC

Brand Owner Address Description
ACUTRAN BROOKS AUTOMATION, INC. 15 Elizabeth Drive Chelmsford MA 01824 transfer robot used in atmospheric process tools and integrated wafer handling systems, namely automated wafer handling platforms for open, ambient air in-line wafer handling platforms;ACCURATE TRANSFER;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. In one embodiment, the invention is a substrate edge gripper assembly for positioning a semiconductor substrate upon a transfer robot. In one embodiment, a modular assembly comprises spring loaded jaws that are mounted on either side of a robot end effector. The jaws are adapted to be actuated by a feature remote from the robot end effector to release the substrate for delivery.