TUNGSTEN

Brand	Owner	Address	Description
LIQUIDMORPHIUM	DONGGUAN REVOLUTION PRODUCT DESIGN CO.,LTD.	Unit 616, D Buiding, Jilian Apartment #1 Qinyuan Rd., Songshan Lake High-tech Dongguan, Guangdong 523000 China	Tungsten; iron; steel alloys; sheets and plates of metal; building materials of metal; wire of common metal alloys, except fuse wire; screws of metal; hardware of metal, small; soldering wire of metal; works of art of common metal; zirconium; aluminium; magnesium; titanium; nickel; zinc; copper, unwrought or semi-wrought; tin; common metals, unwrought or semi-wrought; alloys of common metal;Color is not claimed as a feature of the mark.;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A method and system to form a refractory metal layer over a substrate includes introduction of a reductant, such as PH3 or B2H6, followed by introduction of a tungsten containing compound, such as WF6, to form a tungsten layer. It is believed that the reductant reduces the fluorine content of the tungsten layer while improving the step coverage and resistivity of the tungsten layer. It is believed that the improved characteristics of the tungsten film are attributable to the chemical affinity between the reductants and the tungsten containing compound. The chemical affinity provides better surface mobility of the adsorbed chemical species and better reduction of WF6 at the nucleation stage of the tungsten layer. The method can further include sequentially introducing a reductant, such as PH3 or B2H6, and a tungsten containing compound to deposit a tungsten layer. The formed tungsten layer can be used as a nucleation layer followed by bulk deposition of a tungsten layer utilizing standard CVD techniques. Alternatively, the formed tungsten layer can be used to fill an aperture.