ULTRA TERA CORPORATION

Brand	Owner	Address	Description
UTC	UltraTera Corporation	Science-Based Industrial Park, No. 2 Li-Hsin Rd. 3 Hsin Chu Taiwan	ULTRA TERA CORPORATION;PROVIDING TESTING SERVICE REGARDING THE VLSI (VERY LARGE SCALE INTEGRATED CIRCUITS); PROVIDING TESTING SERVICE REGARDING THE INTEGRATED CIRCUITS, WAFERS AND SEMICONDUCTOR;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

An interconnect structure in back end of line (BEOL) applications comprising a tunable etch resistant anti-reflective (TERA) coating is described. The TERA coating can, for example, be incorporated within a single damascene structure, or a dual damascene structure. The TERA coating can serve as part of a lithographic mask for forming the interconnect structure, or it may serve as a hard mask, a chemical mechanical polishing (CMP) stop layer, or a sacrificial layer during CMP.