ULTRA RESIST

Brand	Owner	Address	Description
ULTRESIST	Anderson Hardwood Floors, Inc.	616 East Walnut Avenue, P.O. Drawer 2128 Dalton GA 307222128	ULTRA RESIST;floor coatings; floor protection varnishes;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

The invention relates to a resist for electron beam lithography and to a process for producing photomasks for optical lithography. The inventive resist includes repeating units that are derived from maleic anhydride and that can act as an anchor group for the subsequent binding of silicon-containing groups. The etch stability of the resist can thus be subsequently increased so that there is no dimensional loss on transfer of the resist structure to a chromium layer arranged under the resist.