UNRECORDED TAPES COATED WITH CHROMIUM

Brand	Owner	Address	Description
AGFA SUPERCHROM	AGFA-GEVAERT AKTIENGESELLSCHAFT	K-RP Markenschutz Postfach 10 01 60 D-51301, Leverkusen Germany	Unrecorded Tapes Coated with Chromium Dioxide for Recording and Reproducing Sound, and Cassettes for Use with Such Tapes;SUPERCHROME;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

The invention relates to a process for the production of photomasks. A film of a photoresist, as used for structuring semiconductor substrates, for example a CARL resist, is applied to a chromium-coated quartz glass substrate. The photoresist layer is written on by means of a focused electron beam, heated and then developed. The now structured resist is treated with an amplification agent and thus increases in its etch resistance to an oxygen plasma. During etching of the bare chromium sections, the silicon introduced into the photoresist is converted into silicon dioxide, which forms a protective layer on the chromium layer. Thus, the structure written in by means of the electron beam can be transferred without loss into the chromium layer.