VARIABLE DIMENSION METALLIC SPACERS FOR

Brand	Owner	Address	Description
VARIPED	PRUFTECHNIK DIETER BUSCH + PARTNER GMBH& CO.	OSKAR MESSTER STRASSE 19-21 ISMANING, BUNDESREPUBLIK Germany	VARIABLE DIMENSION METALLIC SPACERS FOR USE IN ALIGNING MACHINES;VARI-PED;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A method of using carbon spacers for critical dimension reduction can include providing a patterned photoresist layer above a substrate where the patterned photoresist layer has an aperture with a first width, depositing a carbon film over the photoresist layer and etching the deposited carbon film to form spacers on lateral side walls of the aperture of the patterned photoresist layer, etching the substrate using the formed spacers and patterned photoresist layer as a pattern to form a trench having a second width, and removing the patterned photoresist layer and formed spacers using an oxidizing etch.