WAFER PROCESSOR FOR MANUFACTURING

Brand	Owner	Address	Description
ADVANCE 600	ASM INTERNATIONAL N.V.	Jan van Eijcklaan 10 NL-3723 BC Bilthoven Netherlands	WAFER PROCESSOR FOR MANUFACTURING OF SEMI-CONDUCTORS;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A manufacturing method for a semiconductor device which is capable of manufacturing the semiconductor device with a high quality in high yields while reducing variations in electric characteristic is disclosed. The manufacturing method according to the present invention includes a main body wafer manufacturing process for manufacturing a wafer on which a semiconductor device to be completed as a product is formed and a monitor wafer manufacturing process for manufacturing a wafer on which a monitor element is formed, the processes sharing a monitoring step alone, the main body wafer manufacturing process including a variation reduction step, the monitor wafer manufacturing process including a quality check step and a condition setting step.