WATER METERS WHICH MEASURE

Brand	Owner	Address	Description
PAWKIT	DECAGON DEVICES, INC.	2365 NE Hopkins Court Pullman WA 99163	WATER METERS WHICH MEASURE THE QUALITY AND ACTIVITY OF WATER;PAW KIT;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

Provided is a substrate processing apparatus capable of supplying pure water that is stabilized with respect to the concentration of nitrogen gas. First and second nitrogen concentration meters to measure the nitrogen gas concentration of pure water are respectively disposed before and after a concentration change part that can dissolve and degas nitrogen gas by using a hollow fiber type separation membrane. In order to maintain the nitrogen gas concentration of pure water at a target concentration value, the dissolution and degassing in the concentration change part are controlled by adjusting the degree to which a first valve on a nitrogen gas supply path and a second valve on a nitrogen gas degassing path are opened, based on a concentration difference between a target concentration and both of the first and second nitrogen concentration meters.