APPARATUS FOR ELECTRONIC NON CONTACTING FLATNESS

Brand Owner Address Description
WAFERSCAN ADE Corporation 80 Wilson Way Westwood MA 020901806 Apparatus for Electronic Non-Contacting Flatness Gaging of Semiconductor Substrates;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. There is disclosed a wafer flatness evaluation method includes measuring front and rear surface shapes of a wafer. The wafer front surface measured is divided into sites. Then, a flatness calculating method is selected according to a position of the site to be evaluated and flatness in the wafer surface is acquired.