CALIBRATION INSTRUMENTS PROCESS EQUIPMENT

Brand Owner Address Description
ISOTEMP VEECO INSTRUMENTS INC. 1 Terminal Drive Plainview NY 11803 Calibration instruments for process equipment, namely, measurement instruments for chemical vapor deposition equipment;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. The invention relates to a method for calibrating thermal processing equipment used for heat treatment of a multilayer substrate, in particular a multilayer semiconductor substrate. A calibration test profile is determined by processing a calibration test substrate according to thermal process parameters that produce multilayer substrates having an even thickness profile, and/or having reduced slip lines and/or reduced wafer deformation, and/or having other desired and predetermined properties. Then a particular thermal processing equipment is calibrated by determining thermal process parameters for that equipment so that a test substrate processed with these parameters will have the determined calibration test profile.