COMBINATION OPTICAL METROLOGY INSTRUMENTS

Brand	Owner	Address	Description
OCDSE	Nanometrics Incorporated	1550 Buckeye Drive Milpitas CA 95035	combination of optical metrology instruments for measuring such things as microscopic dimensions and film thickness features of samples, particularly, of semiconductor wafers, flat panel displays and magnetic media;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A method of generating a metrology recipe includes identifying regions of interest within a device layout. A coordinate list, which corresponds to the identified regions of interest, can be provided and used to create a clipped layout, which can be represented by a clipped layout data file. The clipped layout data file and corresponding coordinate list can be provided and converted into a metrology recipe for guiding one or more metrology instruments in testing a processed wafer and/or reticle. The experimental metrology results received in response to the metrology request can be linked to corresponding design data and simulation data and stored in a queriable database system.