COMPONENTS OPTICAL INSTRUMENTS

Brand Owner (click to sort) Address Description
ADVANCED SOURCE METROLOGY INSTRUMENT (ASMI) LITEL INSTRUMENTS 6142 Nancy Ridge Drive; Ste. 102 San Diego CA 92121 Components of optical instruments for use in the semiconductor industry, namely, apparatus comprised of computer software for use in analyzing data received from an image capture tool and pinhole cameras located either above or below the reticle plane with corresponding oversized openings in the reticle plane, the whole in the same form factor as a standard reticle for use in exposing photographically prepared patterns and images that are used for measuring and aiming to the surfaces of wafers for use in manufacturing of integrated circuits;Advanced Source Metrology Instrument;
HEIGHT MAPPER (ZMAP) LITEL INSTRUMENTS 6142 Nancy Ridge Drive; Ste. 102 San Diego CA 92121 Components of optical instruments for use in the semiconductor industry, namely, apparatus comprised of computer software for use in analyzing data received from an overlay metrology tool and overlay targets with corresponding half-shade plates located either above or below the reticle plane, the whole in the same form factor as a standard reticle for use in exposing images on wafers that are used for assessing and adjusting the focus of a lithographic stepper or step and scan tool;
HIGH ACCURACY SOURCE METROLOGY INSTRUMENT (HA-SMI). LITEL INSTRUMENTS 6142 Nancy Ridge Drive; Ste. 102 San Diego CA 92121 Components of optical instruments for use in the semiconductor industry, namely, apparatus comprised of computer software for use in analyzing data received from an image capture tool and an in-situ imaging objective with mounting means attached to a framework in the same form factor as a standard reticle for use in exposing photographically prepared patterns and images that are used for measuring and aiming to the sufraces of wafers for use in manufacturing of integrated circuits;High Accuracy Source Metrology Instrument;
HYPER NA ISI LITEL INSTRUMENTS 6142 Nancy Ridge Drive; Ste. 102 San Diego CA 92121 Components of optical instruments for use in the semiconductor industry, namely, apparatus comprised of computer software for use in analyzing data received from an overlay metrology tool and lenses focused on openings in an aperture plate with an intervening patterned chrome face, in the same form factor as a standard reticle for use in exposing photographically prepared patterns in projection imaging systems that potentially operate at numerical apertures above one, and reconstructed lens aberrations that are used for sharpening the image at the surfaces of wafers for use in manufacturing of integrated circuits;HYPER NUMERICAL APERTURES ISI;
HYPER NA SMI LITEL INSTRUMENTS 6142 Nancy Ridge Drive; Ste. 102 San Diego CA 92121 Components of optical instruments for use in the semiconductor industry, namely, apparatus comprised of computer software for use in analyzing data received from an image capture tool and in-situ imaging objectives of the pinhole, refractive or reflective kind, in the same form factor as a standard reticle for use in exposing photographically prepared patterns on projection imaging systems that potentially operate at numerical apertures above one, and images that are used for measuring and aiming to the surfaces of wafers for use in manufacturing of integrated circuits;
POLARIZATION MAPPER (PMAP) LITEL INSTRUMENTS 6142 Nancy Ridge Drive; Ste. 102 San Diego CA 92121 Components of optical instruments for use in the semiconductor industry, namely, apparatus comprised of computer software for use in analyzing data received from an image capture tool and combined in-situ imaging objectives and multiple polarizing elements for use in exposing photographically prepared patterns and images that are used for measuring and adjusting projection imaging systems used in the manufacture of integrated circuits;
SOURCE METROLOGY INSTRUMENT (SMI) LITEL INSTRUMENTS 6142 Nancy Ridge Drive; Ste. 102 San Diego CA 92121 Components of optical instruments for use in the semiconductor industry, namely, apparatus comprised of computer software for use in analyzing data received from an image capture tool and in-situ imaging objectives of the pinhole, refractive or reflective kind, in the same form factor as a standard reticle for use in exposing photographically prepared patterns and images that are used for measuring and aiming to the surfaces of wafers for use in manufacturing of integrated circuits;Source Metrology Instrument;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. An automatic test system, such as might be used to test semiconductor devices as part of their manufacture. The test system uses instruments to generate and measure test signals. The automatic test system has a hardware and software architecture that allows instruments to be added to the test system after it is manufactured. The software is segregated into instrument specific and instrument independent software. Predefined interfaces to the software components allow for easy integration of instruments into the test system and also easy reuse of the software as the physical implementation of the test system or the instruments changes from tester to tester in a product family.