ELECTRONICALLY CONTROLLED APPARATUS DELIVERING

Brand	Owner	Address	Description
DLI	MKS INSTRUMENTS, INC.	2 Tech Drive, Suite 201 Andover MA 01810	electronically controlled apparatus for delivering liquid reactant materials to a process reactor for use in the field of semiconductor device processing;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

An electronically controlled apparatus of the present invention includes: an input-output section, which electronically processes and outputs input data; a control section, which electronically controls the input-output section according to operating status data of each component of the input-output section; a managing section, which monitors the operating status data of each component of the input-output section, so as to store and manage the operating status data with corresponding time information of the operating status data; and a processing section, which creates graphic display of the operating status data in a given time scale according to the operating status data and the time information. With the electronically controlled apparatus, it becomes easier to manage regular inspections and replenishing expendables, without lowering an activity rate.