FILM THICKNESS MEASUREMENT INSTRUMENTS

Brand	Owner (click to sort)	Address	Description
"CAL-PAC"	Nanometrics Incorporated	1550 Buckeye Drive Milpitas CA 95035	FILM THICKNESS REFERENCE STANDARDS FOR FILM THICKNESS MEASUREMENT INSTRUMENTS;CALPAC;CALIFORNIA PACK;
NANOSTANDARD	ONTO INNOVATION INC.	16 Jonspin Road Wilmington MA 01887	film thickness reference standards for calibration of film thickness measurement instruments;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A measurement device for measuring a thickness of a film layer over a substrate utilizes a microwave source and a resonant cavity having an open side. A microwave signal is introduced at a first end of the resonant cavity with the open side against a surface measurement sample having a film layer over a substrate, and an output signal detector senses the output power of the signal at a far end of the resonant cavity. A processor uses a difference in the resulting resonant frequency of the cavity from that using a substrate without the film layer to determine the thickness of the film layer.