MEASUREMENT SYSTEMS MICRO ELECTRONIC

Brand	Owner	Address	Description
MEASURE THIS	Nanometrics Incorporated	1550 Buckeye Drive Milpitas CA 95035	MEASUREMENT SYSTEMS FOR THE MICRO-ELECTRONIC INDUSTRIES FOR CRITICAL DIMENSION CONTROL, COMPRISING OPTICAL AND ROBOTIC COMPONENTS, NAMELY, MICROSCOPE LENSES, POLARIZERS, COMPUTER CONTROLLED MECHANICS AND COMPUTER SOFTWARE, FOR THE CONTROL OF ROBOTIC COMPONENTS AND OPTICAL RADIATION ANALYSIS;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

In order to perform a measurement operation of a pattern and a processing operation in parallel while the positions of two substrate stages are accurately measured and wire/hose units are prevented from becoming tangled, a substrate processing apparatus includes an alignment system for measuring the pattern arrangements of the substrates, a processing system disposed separately from the alignment system and used for processing the substrates, substrate stages which are able to support the substrates and move in an xy plane, and position measurement systems which measure the positions of the substrate stages. Four position measurement systems are arranged for the measurement in the x direction, and three position measurement systems are arranged for the measurement in the y direction. One of the position measurement systems for the measurement in the y direction is disposed at a side opposite to the remaining positioning measurement systems across the substrate stages.