METAL ORGANIC CHEMICAL VAPOR DEPOSITION

Brand	Owner (click to sort)	Address	Description
EPIK	VEECO INSTRUMENTS, INC.	1 Terminal Drive Plainview NY 11803	Metal organic chemical vapor deposition (MOCVD) machines;EPIC;
EPIK 700	VEECO INSTRUMENTS INC.	1 Terminal Drive Plainview NY 11803	Metal organic chemical vapor deposition (MOCVD) machines;EPIC SEVEN HUNDRED;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A technique for more efficiently forming conductive elements, such as conductive layers and electrodes, using chemical vapor deposition. A conductive precursor gas, such as a platinum precursor gas, having organic compounds to improve step coverage is introduced into a chemical vapor deposition chamber. A reactant is also introduced into the chamber that reacts with residue organic compounds on the conductive element so as to remove the organic compounds from the nucleating sites to thereby permit more efficient subsequent chemical vapor deposition of conductive elements.