METAL ORGANIC VAPOR PHASE DEPOSITION

Brand Owner Address Description
FLOWFLANGE VEECO INSTRUMENTS INC. 1 Terminal Drive Plainview NY 11803 Metal organic vapor phase deposition system, namely, a gas distribution system used in the manufacture of semiconductor devices, comprised of system-dependent vacuum components, namely, pumps, and other machined components, namely, tube fittings, viewports, gaskets, injector plates, adjustable viewport tubes, screen and viewport spacers, injector rings, and weldment flanges; all of the aforementioned sold as a unit;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. In one embodiment, the present invention includes introducing a conventional precursor and an organic precursor having an organic porogen into a vapor deposition apparatus; and forming a dielectric layer having the organic porogen on a substrate within the vapor deposition apparatus from the precursors. In certain embodiments, at least a portion of the organic porogen may be removed after subsequent processing, such as dual damascene processing.