METROLOGY SYSTEM COMPRISING METROLOGY TOOLS

Brand Owner Address Description
LUMIMAP Bruker Nano, Inc. 112 Robin Hill Road Santa Barbara CA 93117 metrology system comprising metrology tools for surface analysis and software for enhancing high performance of nanoscale metrology for in-situ monitoring of expatial layers grown on a substrate;LUMIMAP; LUMINANCE MAP;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. A processing apparatus for processing a microelectronic workpiece includes a metrology unit and a control, signal-connected to the metrology unit. The control can modify a process recipe or a process sequence of the processing apparatus based on a feed forward or a feed back signal from the metrology unit. A seed layer deposition tool, a process layer electrochemical deposition tool, and a chemical mechanical polishing tool, arranged for sequential processing of a workpiece, can be controlled as an integrated system using one or more metrology units. A metrology unit can be located at each tool to measure workpiece parameters. Each of the metrology units can be used as a feed forward control and/or a feed back control at each of the tools.