METROLOGY INSPECTION SYSTEMS

Brand Owner Address Description
INTOOL Nanometrics Incorporated 1550 Buckeye Drive Milpitas CA 95035 Metrology and inspection systems for integration into semiconductor wafer, magnetic read-write head, and flat panel display processing and related equipment; such as, but not limited to, chemical mechanical polishers, chemical vapor deposition reactors, physical vapor deposition reactors, rapid thermal processors, wet and dry etchers, epitaxial reactors, ion implanters, material handlers, lithography track and exposure systems, and assemblies thereof;IN TOOL;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. Fluid immersion technology can be utilized to increase the resolution and angular range of existing metrology systems. An immersion fluid placed between the metrology optics and the sample can reduce the refraction at the sample interface, thereby decreasing the spot size of the beam on a feature of the sample while simultaneously increasing the angular range of the system. The decreased spot size, in combination with an increased angular spread, allows an existing metrology system to measure parameters of a sample, such as a semiconductor or microelectronic device, with improved resolution and without expensive and/or complex changes to the mechanics of the metrology system.