METROLOGY INSTRUMENTS COMPONENTS THEREOF

Brand Owner (click to sort) Address Description
ICON Bruker Nano, Inc. 112 Robin Hill Road Santa Barbara CA 93117 Metrology instruments and components thereof, namely, scanning probe microscopes (SPMs) and atomic force microscopes (AFMs);
INNOVA Bruker Nano, Inc. 112 Robin Hill Road Santa Barbara CA 93117 Metrology instruments and components thereof, namely, scanning probe microscopes (SPMs) and atomic force microscopes (AFMs);
INSIGHT Bruker Nano, Inc. 112 Robin Hill Road Santa Barbara CA 93117 Metrology instruments and components thereof, namely, scanning probe microscopes (SPMs) and atomic force microscopes (AFMs);
WHISPER VEECO INSTRUMENTS, INC. 1 Terminal Drive Plainview NY 11803 Metrology instruments and components thereof, namely, scanning probe miscroscopes (SPMs) and atomic force microscopes (AFMs);
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. A method of generating a metrology recipe includes identifying regions of interest within a device layout. A coordinate list, which corresponds to the identified regions of interest, can be provided and used to create a clipped layout, which can be represented by a clipped layout data file. The clipped layout data file and corresponding coordinate list can be provided and converted into a metrology recipe for guiding one or more metrology instruments in testing a processed wafer and/or reticle. The experimental metrology results received in response to the metrology request can be linked to corresponding design data and simulation data and stored in a queriable database system.