METROLOGY SYSTEM CONSISTING

Brand Owner Address Description
CALIPER INSIGHT Nanometrics Incorporated 1550 Buckeye Drive Milpitas CA 95035 Metrology system consisting of an automated wafer handling system consisting of an XY theta stage and vertical axis drive for positioning the wafer, an optical imaging microscope and an image processing and control computer for the measurement of registration and overlay errors on semiconductor waters and similar substrates;CALIPER;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. A method, apparatus, and a system for providing data representation associated with non-sampled workpieces. Measured metrology data relating to a first workpiece is received. Metrology data corresponding to a second workpiece is approximated based upon the metrology data relating to the first workpiece to provide a projected metrology data relating to the second workpiece.