OPTICAL MONITORING DEVICES MONITORING

Brand Owner Address Description
QUEST VEECO INSTRUMENTS INC. 1 Terminal Drive Plainview NY 11803 Optical monitoring devices for monitoring properties of coatings for use in thin film production;
 

Where the owner name is not linked, that owner no longer owns the brand

   
Technical Examples
  1. A chemical mechanical polishing apparatus and method can use an eddy current monitoring system and an optical monitoring system. Signals from the monitoring systems can be combined on an output line and extracted by a computer. A thickness of a polishing pad can be calculated. The eddy current monitoring system and optical monitoring system can measure substantially the same location on the substrate.