PLASMA REACTOR FOR CLEANING

Brand Owner (click to sort) Address Description
PLASMALINE Tegal Corporation Richmond CA Plasma Reactor for Cleaning, Etching, and Treating Semiconductor Wafers in a Radio-Frequency-Induced Plasma;
TEGAL CORPORATION Tegal Corporation Richmond CA Plasma Reactor for Cleaning, Etching or Treating Articles in an RF Induced Plasma;Applicant disclaims the word Corporation apart from the mark as shown.;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. A method for plasma cleaning a CVD reactor chamber including providing a plasma enhanced CVD reactor chamber comprising residual deposited material; performing a first plasma process comprising an oxygen containing plasma; performing a second plasma process comprising an argon containing plasma; and, performing a third plasma process comprising a fluorine containing plasma.