SCANNING TRANSMISSION ELECTRON MICROSCOPE

Brand	Owner	Address	Description
OPTIS	FEI COMPANY	5350 NE Dawson Creek Drive Hillsboro OR 97124	Scanning transmission electron microscope for sample preparation and imaging analysis in the field of semiconductors;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A scanning transmission electron microscope which enhances correction accuracy of a de-scanning coil for canceling a transmitted-electron-beam position change on an electron detector. Here, this transmitted-electron-beam position change appears in accompaniment with a primary-electron-beam position change on a specimen caused by a scanning coil. First, control over the scanning coil is digitized. Moreover, while being synchronized with a digital control signal resulting from this digitization, values in a de-scanning table registered in a FM(2) are outputted to the de-scanning coil. Here, the de-scanning table is created as follows: Diffraction images before and after activating the scanning coil and the de-scanning coil are photographed using a camera. Then, based on a result acquired by analyzing a resultant displacement quantity of the diffraction images by the image processing, the de-scanning table is created.