SEMICONDUCTOR PROCESSING TOOLS

Brand	Owner	Address	Description
NOVOL	Tegal Corporation	Richmond CA	SEMICONDUCTOR PROCESSING TOOLS, NAMELY, ETCHING TOOLS FOR USE IN ETCHING NON-VOLATILE AND LOW VOLATILITY MATERIALS AND FILMS, SUCH AS PLATINUM, IRIDIUM, IRIDIUM OXIDE, BARIUM STRONTIUM TITANATE (BST), STRONTIUM BISMUTH TITANATE (SBT), STRONTIUM TITANATE (STO), RUTHENIUM, RUTHENIUM OXIDE, LEAD ZIRCONIUM TITANATE (PZT), IRON, NICKEL, AND COPPER FILMS, IN THE FORMATION OF SEMICONDUCTOR DEVICES; COMPUTER HARDWARE USED WITH SEMICONDUCTOR PROCESSING TOOLS, AND SOFTWARE USED TO CONTROL THE SEMICONDUCTOR PROCESSING TOOLS;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

In a first aspect, a method of managing work in progress within a small lot size semiconductor device manufacturing facility is provided. The first method includes providing a small lot size semiconductor device manufacturing facility having (1) a plurality of processing tools; and (2) a high speed transport system adapted to transport small lot size substrate carriers among the processing tools. The method further includes maintaining a predetermined work in progress level within the small lot size semiconductor device manufacturing facility by (1) increasing an average cycle time of low priority substrates within the small lot size semiconductor device manufacturing facility; and (2) decreasing an average cycle time of high priority substrates within the small lot size semiconductor device manufacturing facility so as to approximately maintain the predetermined work in progress level within the small lot size semiconductor device manufacturing facility. Numerous other aspects are provided.