SEMINCONDUCTOR WAFER PROCESSING EQUIPMENT

Brand Owner Address Description
NPOINT Strasbaugh 825 Buckley Road San Luis Obispo CA 93401 Seminconductor wafer processing equipment, namely, chemical mechanical planarizers, silicon wafer carriers, silicon wafer loaders, silicon wafer endpoint detectors, silicon wafer grinders, and silicon wafer polishers; photonics, optical and telecommunication component processing equipment, namely, chemical mechanical planarizers, silicon wafer carriers, silicon wafer loaders, silicon wafer endpoint detectors, silicon wafer grinders, and silicon wafer polishers, and replacement parts therefore; all for the research, failure analysis, processing and production of semiconductor substrates, thin films, silicon discs, silicon wafers, optical components, photonics components, and telecommunication components;N POINT; IN POINT;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. The invention relates to a method for calibrating thermal processing equipment used for heat treatment of a multilayer substrate, in particular a multilayer semiconductor substrate. A calibration test profile is determined by processing a calibration test substrate according to thermal process parameters that produce multilayer substrates having an even thickness profile, and/or having reduced slip lines and/or reduced wafer deformation, and/or having other desired and predetermined properties. Then a particular thermal processing equipment is calibrated by determining thermal process parameters for that equipment so that a test substrate processed with these parameters will have the determined calibration test profile.