SOFTWARE METROLOGY TOOLS

Brand Owner Address Description
AUTOMET Bruker Nano, Inc. 112 Robin Hill Road Santa Barbara CA 93117 Software for metrology tools, namely, analysis software for atomic force microscopes;AUTO METROLOGY;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. A processing apparatus for processing a microelectronic workpiece includes a metrology unit and a control, signal-connected to the metrology unit. The control can modify a process recipe or a process sequence of the processing apparatus based on a feed forward or a feed back signal from the metrology unit. A seed layer deposition tool, a process layer electrochemical deposition tool, and a chemical mechanical polishing tool, arranged for sequential processing of a workpiece, can be controlled as an integrated system using one or more metrology units. A metrology unit can be located at each tool to measure workpiece parameters. Each of the metrology units can be used as a feed forward control and/or a feed back control at each of the tools.