THIN FILM DEPOSITION SYSTEMS

Brand	Owner (click to sort)	Address	Description
CMS TOOLS	KURT J. LESKER COMPANY	1925 ROUTE 51 JEFFERSON HILLS PA 15025	Thin film deposition systems and tools;
FAST	VEECO INSTRUMENTS INC.	1 Terminal Drive Plainview NY 11803	Thin film deposition systems for semiconductor fabrication equipment/machines;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

In a display device including thin film transistors formed on an insulation substrate, the thin film transistor includes a semiconductor layer, a gate electrode and a gate insulation film which is interposed between the semiconductor layer and the gate electrode. The gate insulation film includes at least one layer of deposition film which is deposited by a deposition method, and the carbon concentration of the gate insulation film which is formed without interposing other deposition film deposited by a deposition method between the one deposition film and the semiconductor layer has the distribution in which the carbon concentration is smaller at a side close to the semiconductor layer than at a side remote from the semiconductor layer. Due to such a constitution, it is possible to obviate the elevation of a level of an interface of the insulation film with respect to a poly silicon layer and it is also possible to obviate an increase of fixed charges in the inside of the insulation film in the thin film transistor.