WAFER HANDLING PLATFORM PRECISION

Brand Owner Address Description
CASCADE ETCH VEECO INSTRUMENTS INC. 1 Terminal Drive Plainview NY 11803 Wafer handling platform for precision surface processing (PSP) systems for semiconductor fabrication equipment, namely, wafer handling arms, wafer handling components, namely, wafer chucks and end-effectors, industrial robots and operating software sold as an integral component thereof, wafer aligners and wafer handling industrial robots for use in the field of semiconductor fabrication;ETCH;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. A wafer staging platform for a wafer inspection system for inspecting of semiconductors or like substrates and method of handling wafers. The platform and related method is designed to reduce the amount of time needed to exchange wafers on a processing tool. The staging platform can include a vacuum-assisted feature. The method of handling includes simultaneously processing a plurality of wafers, during which the staging platform is employed to temporarily store wafer(s) in close proximity to a next in line station.