METROLOGY SYSTEM ANALYSIS

Brand Owner Address Description
EPIC Nanometrics Incorporated 1550 Buckeye Drive Milpitas CA 95035 metrology system for the analysis and determination of properties such as thickness and optical constants of films on samples such as semiconductor wafers using different optical technologies for film analysis such as Fourier Transform Infrared (FTIR), visible and ultraviolet (UV) reflectometry;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. A method, apparatus, and a system for providing data representation associated with non-sampled workpieces. Measured metrology data relating to a first workpiece is received. Metrology data corresponding to a second workpiece is approximated based upon the metrology data relating to the first workpiece to provide a projected metrology data relating to the second workpiece.